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如何通过扫描电镜能谱分析,给出可信的成分分析结果?

 发布时间:2019-06-12 点击量:315

一、能谱定量不准确的原因

 

NENGPU(EDS)JIEHESAOMIAODIANJINGSHIYONG,NENGJINXINGCAILIAOWEIQUYUANSUZHONGLEIYUHANLIANGDEFENXI。QIGONGZUOYUANLISHI:GEZHONGYUANSUJUYOUZIJIDE X SHEXIANTEZHENGBOZHANG,TEZHENGBOZHANGDEDAXIAOZEQUJUEYUNENGJIYUEQIANGUOCHENGZHONGSHIFANGCHUDETEZHENGNENGLIANG E,NENGPUYIJIUSHILIYONGBUTONGYUANSU X SHEXIANGUANGZITEZHENGNENGLIANGBUTONGZHEIYITEDIANLAIJINXINGCHENGFENFENXIDE。

 

NENGPUDINGLIANGFENXIDEZHUNQUEXINGYUYANGPINDEZHIYANGGUOCHENG,YANGPINDEDAODIANXING,YUANSUDEHANLIANGYIJIYUANSUDEYUANZIXUSHUYOUGUAN。YINCI,ZAIDINGLIANGFENXIDEGUOCHENGZHONGJIYOUYIXIEYUANLISHANGDEWUCHA(SHUJUKUJIBIAOZHUN),WOMENWUFAXIAOCHU,YEYOUYIXIERENWEIYINSUCHANSHENGDEWUCHA(CAOZUOFANGFA),ZHEIXIEYINSUDOUHUIDAOZHINENGPUDINGLIANGBUZHUNQUE。

 

二、飞纳能谱面扫

 

1. GENJUCHENDUBIANHUAPANDUANYUANSUDEFUJICHENGDU

 

LIYONGNENGPUFENXINENGGOUGENJUCHENDUBIANHUAPANDUANYUANSUZAIBUTONGWEIZHIDEFUJICHENGDU。

 

RUTU 1,WOMENHUODELECAILIAODEBEISANSHETUXIANGYIJINENGPUMIANSAO Si DEFENBUTU,QIZHONG Si HANLIANGWEI20.38%。ZAIBEISANSHETUJIMIANSAOTUZHONG,KEYIKANDAOBUTONGQUYUCHENDUBUTONG,ZHEISHIBUTONGQUYU Si HANLIANGBUTONGZAOCHENGDE。WOMENXUANQULEDIAN 2-7,QIDIANSAOJIEGUO Si HANLIANGFENBIEWEI 19.26%、36.37%、18.06%、1.54%、20.17%、35.57%。

 

ZHEIZHONGTONGGUOCHENDUPANDUANYUANSUHANLIANGDEFANGFAZAIHEJIN(TONGGUOHANLIANGJINERTUIDUANHEJINZHONGHANYOUJINXIANGDEZHONGLEI,BUTONGDEJINXIANGHANYOUDEMOUZHONGYUANSUYOUGUDINGDEHANLIANGQUJIAN),DIZHI(TONGGUOHANLIANGPANDUANKUANGSHIDENGDEZHONGLEI)DENGXINGYEYOUGUANGFANDEYINGYONG。

 

    

TU1. ZUOTUWEICAILIAOBEISANSHETUJINENGPUDIANSAOWEIZHI,YOUTUWEINENGPUMIANSAO Si HANLIANGDEFENBU

 

滚球体育2. PANDUANWEILIANGYUANSUDEFENBU

 

滚球体育LIYONGNENGPU,KEYIXUNZHAOJIWEILIANGYUANSUZAICAILIAOZHONGFENBUDEJUTIWEIZHI,XIANTONGGUOMIANSAOJINXINGWEILIANGYUANSUFENBUWEIZHIDEPANDUAN,RANHOUTONGGUODIANSAOQUEDING。

 

滚球体育RUXIATU,ZUOBIANWEIBEISANSHETUXIANG,YOUBIANFENBIEDUIYING Al、Cr、Fe、Mg、Si、Ca、Ti、P,TAMENDEHANLIANGRUBIAO 1,TONGGUONENGPUMIANSAOMIAOFENXIDEDAOGEYUANSUHANLIANG,QIZHONG P DEHANLIANGWEI 0.09%。

 

滚球体育TU2. CAILIAODEBEISANSHETUJI Al、Cr、Fe、Mg、Si、Ca、Ti、P YUANSUDEFENBU

 

BIAO1. TU 2 ZHONG Al、Cr、Fe、Mg、Si、Ca、Ti、P YUANSUHANLIANG

 

滚球体育GONGCHENGSHIDUIYANGPINJINXINGDIANSAOQUEREN,WEIZHI 7 SHIMIANSAOJIEGUO P YUANSUFUJIQU,QIGEYUANSUFENBURUBIAO 2,ZHEIGEWEIZHIDE P HANLIANGGAODA 14.56%,JUBUHANLIANGBIZHENGTIHANLIANGGAO 160 BEI。

 

TU3. BEISANSHETUXIANGJIYANGPINDIANSAOWEIZHI

 

BIAO2. YANGPINDIANSAOWEIZHI 7 GEYUANSUDEHANLIANG

 

三. 飞纳获得高质量面扫结果的原因

 

1) 灯丝亮度决定能谱信号的强度,飞纳电镜采用 CeB6 灯丝,具有高亮度,可以获得高强度的能谱信号。
2) 采用新型 SDD 窗口材料 Si3N4,提高了穿透率,透过率由 30% 提高到 60%。比传统聚合物超薄窗透过率提高 35% 以上。
3) 采用 Cube 技术提高响应速度(计数率)并降低了噪音(分辨率提高),是国际上处理速度高的能谱系统,解决了计数率与分辨率的冲突。

 

RUTU 4 SUOSHI,FEINADIANJINGNENGPUYITIJIKEYIHUODEGENGGAOJISHULVYUGENGGAOFENBIANLVDENENGPUJIEGUO。

 

TU4. FEINANENGPUJIEGUO

 

FEINADIANJINGNENGPUYITIJI Phenom ProX BUXUYAOYEDAN、ZHILENGSUDUKUAI、XINHAOQIANGDUDA、FENBIANLVGAO、TIJIHEZHONGLIANGXIAO,ZHENKONGMIFENGXINGGAO,KEYISHIYONGGENGSHAODENENGLIANGHUODEGENGDIDEWENDU。CHICUNGENGWEIJINCOU,SHIYONGYUBUTONGHUANJINGXUQIU。

 

四. 小技巧-如何提高能谱的准确性

 

· 能谱使用前要校准
· 保证样品平整
· 保证分析区域均质、无污染
· 保证样品导电性、导热性良好

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